Description
INFICON Pirani 标准真空计 PSG500、PSG502-S、PSG510-S 和 PSG512-S 采用当今市场上最先进的数字 Pirani 技术，不锈钢传感器单元坚固耐用，结构设计紧凑，适用于半导体系统和标准应用，例如前级真空管。
好处
轻松一键调节 ATM 和 HV
节省空间的坚固设计
铝质壳体
可安装在任何方向
不锈钢测量单元，带金属密封馈入装置
对数信号输出，易于集成
螺纹接头，具有 10 bar 绝对过压能力
250°C 可烘烤装置
镍丝选件，适用于腐蚀性应用
陶瓷馈入装置，适用于腐蚀性极强的应用（PSG510 和 PSG512)
可选设定点
符合 RoHS 标准
典型应用
高真空电离真空计控制
前级真空压力监控
真空系统中的安全电路
高真空和低真空范围内的一般真空测量和控制
规格
PSG500 tungsten
PSG500-S tungsten, setpoints
PSG502-S nickel, setpoints
PSG510-S tungsten, setpoints, ceramic feedthroughs
PSG512-S nickel, setpoints, ceramic feedthroughs
Measurement range
V
+1.9 … +10.0
Accuracy(N2)
1 x 10-3 … 100 mbar
% of reading
±15%
5 x 10-4 … 1 x 10-3 mbar
% of reading
±50%
100 … 1000 mbar
% of reading
±50%
Repeatability (air)
1 x 10-3 … 100 mbar
% of reading
2%
Admissible temperature
Operation
°C
+5 … +60
Vacuum connection (1)
°C
80 / 250 (2)
Storage
°C
-20 … +65
Supply voltage
At gauge
V (dc)
+14 …+30
Ripple
V (p-p)
≤1
Power consumption
W
≤1
Setpoint
Number of setpoints
Number of setpoints
none
Setting range
mbar
‒
Hysteresis
% of reading
‒
Relay contact
‒
Relay contact: Switching time
ms
‒
Materials exposed to vacuum
glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Part Number
Accessories
Spare Parts
PSG500 tungsten
350-060
PSG500 DN 16 ISO-KF.
350-061
PSG500 1/8" NPT
350-062
PSG500 DN 16 CF-R
350-063
PSG500 1/2" Tube
350-064
PSG500 8-VCR (1/2")
350-065
PSG500 4-VCR (1/4")
350-066
PSG500 7/16-20 UNF
350-067
PSG500 DN 16 ISO-KF, ext. body
350-068
PSG500 DN 16 CF-R, ext. body
PSG500-S tungsten, setpoints
350-080
PSG500-S DN 16 ISO-KF
350-081
PSG500-S 1/8" NPT
350-082
PSG500-S DN 16 CF-R
350-083
PSG500-S 1/2" Tube
350-084
PSG500-S 8-VCR (1/2")
350-085
PSG500-S 4-VCR (1/4")
350-086
PSG500-S 7/16-20 UNF
350-087
PSG500-S DN 16 ISO-KF, ext. body
350-088
PSG500-S DN 16 CF-R, ext. body
PSG502-S nickel, setpoints
350-140
PSG502-S DN 16 ISO-KF
350-141
PSG502-S 1/8" NPT
350-142
PSG502-S DN 16 CF-R
350-143
PSG502-S 1/2" Tube
350-144
PSG502-S 8-VCR (1/2")
350-145
PSG502-S 4-VCR (1/4")
350-146
PSG502-S 7/16-20 UNF
350-147
PSG502-S DN 16 ISO-KF, ext. body
350-148
PSG502-S DN 16 CF-R, ext. body
PSG510-S tungsten, setpoints, ceramic feedthroughs
350-200
PSG510-S DN 16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
350-300
PSG512-S DN 16 ISO-KF
